Formation of Diamond-Like Carbon Film on Organic Substrate by High Power Impulse Magnetron Sputtering

Diamond-like carbon（DLC）film was deposited on organic substrates using highpower impulse magnetron sputtering（HiPIMS）without substrate bias voltage. The DLC film properties were evaluated Raman spectroscopy and X-ray photoelectron spectroscopy. Results show that the sp3 contents of films PTFE or PA6 greater than those POM substrate. ion energy distribution functions（IEDFs）of carbon argon measured energy-resolved mass spectrometry to evaluate high-energy production. From HiPIMS, with more 30 eV detected, whereas ions distributed in low-energy region. Comparison IEDFs HiPIMS obtained direct current sputtering confirmed higher-energy ions, which contribute increased bonding, produced higher intensity HiPIMS.